A Proven Partner for Semiconductor Equipment Refurbishment and Parts Supply
About Us
Supporting Semiconductor Industry with Innovation & Trust
BTS SEMI serves as a critical partner to the Japanese semiconductor industry, maximizing client production efficiency through high-quality equipment parts supply and expert maintenance services.
Premium Quality
We supply the finest semiconductor equipment parts, selected under rigorous quality standards.
Trust & Partnership
Through long-term partner relationships, we place your success as our highest priority.
Rapid Response
Even in emergencies, we guarantee uptime with swift parts procurement and technical support.
Reliable Parts, Perfect Service.
Two core competencies to support your success.
Used Equipment Refurbishment & Maintenance
We provide professional service and preventive maintenance to keep semiconductor manufacturing equipment at optimal performance. Used equipment refurbishment Upgrade and modification support Relocation SET-UP Process conversion/Wafer conversion (8<->6) BM & PM support
View Equipment Page- Regular preventive maintenance programs
- Emergency equipment repair & technical support
- Equipment performance optimization consulting
- Parts replacement and upgrade services
- Refurbishment & modifications
- Wafer size conversion and relocation SET-UP support
- Field Service : BM & PM
- Parts supply and repair
High-Quality Semiconductor Parts Supply
Through our global supply chain network, we rapidly deliver high-quality semiconductor equipment and parts.
View Parts Page- A differentiated supply chain focused on Japanese customers
- Rigorous quality inspection processes
- Fast delivery and stable inventory management
- Competitive pricing and flexible supply terms
- AMAT CVD/PVD System : 200mm/300mm
- AMAT ETCH : 200mm (with partner support)
AMAT Used Equipment Supply & Modification Record
| Customer | Equipment | Year |
|---|---|---|
| SONY Nagasaki (300mm) | 300m ULTIMA-X HDP Refurbish System 2 Units | 2018~2019 |
| SONY Oita (300mm) | 300mm Producer-SE Process Conversion 2 Cases | 2017 |
| SONY Kagoshima (200mm) | 200mm Producer Process Conversion 2 Cases, Relocation 2 Cases | 2015 |
| ROHM Hamamatsu (300mm) | 300mm ULTIMA-X HDP Refurbish System 2 Units | 2018~2021 |
| ROHM Hamamatsu (200mm) | 200mm Ultima HDP: Annual Maintenance Contract | 2018 |
| ROHM Hamamatsu (200mm) | 200mm Ultima HDP Process Conversion (STD=>PLUS) 1 Case | 2020 |
| RICOH Yashiro (200mm) | 200MM CENTURA DPS POLY ETCH Refurbish System 1 Unit | 2018 |
| ROHM Apollo (200mm) | 200mm ENDURA Preclean Chamber Expansion 1 Case | 2021 |
| TDK Asama (150mm) | 150mm AMAT CENTURA DXZ Refurbish System 1 Unit | 2021 |
| TDK Asama (150mm) | 150mm AMAT ENDURA Refurbish System 1 Unit | 2022 |
| TDK Asama (150mm) | 150mm AMAT CENTURA DXZ Refurbish System 1 Unit | 2022 |
| LAPIS Miyagi (200mm) | 200mm Endura PVD Refurbish system 1 Unit | 2016 |
| EPSON Sakata (200mm) | 200mm Producer Refurbish System 1 Unit | 2014 |
| TOSHIBA Iwate (200mm) | 200mm Ultima HDP Process Conversion (STD=>PLUS) 1 Case | 2012 |
| Kyushu Semiconductor (150mm) | 150mm P5000 Refurbish System 1 Unit | 2011 |